[labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate

[Richelson, Tucson]

Hello all,

I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn't have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).

I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.

Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?


[cid:image001.png at 01D9CF69.BC18FC10]



Best,

Tucson Richelson

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