[labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate

[Michael Yakimov]

You absolutely need a magnetic keeper, but Cu backing isnt mandatory.
What I did in exact same situation was drilling a hole in a target to 3/4 depth (used lathe for centering) and threaded it with a bottoming tap. Then screw keeper to target using a vacuum screw.
Gluing a keeper with epoxy or a through hole with Ti screw are other options.

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________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Richelson, Tucson <tucsonr at illinois.edu>
Sent: Tuesday, August 15, 2023 12:16:27 PM
To: 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate


Hello all,



I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn’t have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).



I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.



Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?





[cid:image001.png at 01D9CF69.BC18FC10]





Best,

Tucson Richelson

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