[labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate

[Welander, Paul B.]

Tucson,

We also have a Pro-Line sputtering system from Lesker with Torus Mag-Keeper guns. We've sputtered Ti in this system, and our 1/4"-thick target has the keeper "washer" screwed directly into the back of the target. Lesker will typically offer this where they can drill and tap directly into the target material, and only utilize a backing plate where necessary.

Hope that helps, and good luck!

Paul

******************************************
Paul B. Welander, Ph.D.
SLAC National Accelerator Laboratory
2575 Sand Hill Road, M/S 94
Menlo Park, CA 94025
welander at slac.stanford.edu
******************************************
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Richelson, Tucson <tucsonr at illinois.edu>
Sent: Tuesday, August 15, 2023 9:16 AM
To: 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate


Hello all,



I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn’t have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).



I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.



Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?





[cid:image001.png at 01D9CF69.BC18FC10]





Best,

Tucson Richelson

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