[labnetwork] Argon vs Krypton for sputtering

[Mark Weiler]

HI Rob,

This paper may help.  We did heaps of sputtering measurements for spacecraft materials at CSU…usually with Xenon…. But occasionally with Argon and Krypton.  Enjoy...


https://projects-web.engr.colostate.edu/ionstand/publications/papers/IEPC-2005-293.pdf
IEPC-2005-293
PDF Document · 544 KB

Best,

Mark

Mark Weiler
Manager, Equipment & Facilities
Bertucci Nanotechnology Laboratory
Eden Hall Nanofabrication Cleanroom
Carnegie Mellon University
P:	412-268-2471
F:	412-268-3497
http://www.nanofab.ece.cmu.edu

...Success consists of getting up just one more time than you fall… OG








> On Aug 31, 2023, at 12:50 PM, Macdonald, Robert (GE Aerospace, US) <robert.macdonald at ge.com> wrote:
> 
> Hi all,
>  
> I’m wondering when folks use Krypton or other noble gasses for sputtering in their facilities, and why. I have read that ideally, one matches the atomic weight of the target with the gas. Thus, Neon for lighter targets, Krypton for heavier.
>  
> In practice I see Ar used for all materials.
>  
> Any thoughts or opinions would be of interest.
>  
> Thanks,
>  
> Rob
>  
>  
>  
> Robert MacDonald
> MEMS Engineer
> GE Research
> 1 Research Circle
> Niskayuna, NY 12309
> 518 312-5646
> Robert.macdonald at ge.com <mailto:Robert.macdonald at ge.com>
>  
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