[labnetwork] Argon vs Krypton for sputtering

[Demis D. John]

We use Ar for our 2-inch magnetron sputter recipes, and Xe for our ion beam
sputter system - which gets us higher dep rate. The ion Beam ignites and
grid cleans with cheaper Ar, but recipes switch to Xe for dep steps only.
— Demis


On Thu, Aug 31, 2023 at 17:04 Mark Weiler <mweiler at andrew.cmu.edu> wrote:

> HI Rob,
>
> This paper may help.  We did heaps of sputtering measurements for
> spacecraft materials at CSU…usually with Xenon…. But occasionally with
> Argon and Krypton.  Enjoy...
>
>
> [image: preview.png]
>
> IEPC-2005-293
> <https://projects-web.engr.colostate.edu/ionstand/publications/papers/IEPC-2005-293.pdf>
> PDF Document · 544 KB
> <https://projects-web.engr.colostate.edu/ionstand/publications/papers/IEPC-2005-293.pdf>
>
> <https://projects-web.engr.colostate.edu/ionstand/publications/papers/IEPC-2005-293.pdf>
>
> Best,
>
> Mark
>
> Mark Weiler
> Manager, Equipment & Facilities
> Bertucci Nanotechnology Laboratory
> Eden Hall Nanofabrication Cleanroom
> Carnegie Mellon University
> P: 412-268-2471
> F: 412-268-3497
> http://www.nanofab.ece.cmu.edu
>
> ...Success consists of getting up just one more time than you fall… OG
>
>
>
>
>
>
>
>
> On Aug 31, 2023, at 12:50 PM, Macdonald, Robert (GE Aerospace, US) <
> robert.macdonald at ge.com> wrote:
>
> Hi all,
>
> I’m wondering when folks use Krypton or other noble gasses for sputtering
> in their facilities, and why. I have read that ideally, one matches the
> atomic weight of the target with the gas. Thus, Neon for lighter targets,
> Krypton for heavier.
>
> In practice I see Ar used for all materials.
>
> Any thoughts or opinions would be of interest.
>
> Thanks,
>
> Rob
>
>
>
> Robert MacDonald
> MEMS Engineer
> GE Research
> 1 Research Circle
> <https://www.google.com/maps/search/1+Research+Circle+Niskayuna,+NY+12309?entry=gmail&source=g>
> Niskayuna, NY 12309
> <https://www.google.com/maps/search/1+Research+Circle+Niskayuna,+NY+12309?entry=gmail&source=g>
> 518 312-5646
> Robert.macdonald at ge.com
>
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