[labnetwork] Budgeting a cleanroom build

[Beaudoin, Mario]

Kevin,

We did a 1500 sq ft cleanroom:

  * Yellow room, class 100, 350 sq ft
  * Yellow room, class 1000, 350 sq ft
  * white room, class 1000, 900 sq ft
  * 9ft high inside clearance

The cost to purchase the cleanroom and have it installed in an old 
building where all the services are in a mezzanine above the room cost 
us 5M$ CAD (roughly 4M$ USD).  Hope this helps.

Mario

On 2023-02-07 3:01 p.m., Kevin M McPeak wrote:
> [CAUTION: Non-UBC Email]
>
> Dear Colleagues,
>
> At LSU, we are putting together a proposal to build a cleanroom on campus (our current one is 15 min away). Our VP of research has asked me to determine a rough budget for constructing a microelectronics cleanroom. Below are the itemized details:
>
> - Size: 2000 sqft of class 100 space and 2000 sqft of grey room space. Our current off-campus cleanroom is 2000 sqft.
> - Location: 5th floor (top floor) of chemistry building (total space of 5th floor is 12,000 sqft)
> - Current condition of space:  5th floor is unfinished, i.e., concrete floors with pipes coming from the ground and 10ft ceilings.
>
> I want to factor in the following costs: air handlers, toxic gas handling for PECVD, LPCVD, and ICP-RIE machines, and getting utilities to each tool, i.e., power, water, and N2.
>
> $8 million is the current number that people are tossing around. I would greatly appreciate the feedback on that value. I certainly don't want to underfund the project. Thanks!
>
> Regards,
> Kevin
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