[labnetwork] third party companies for servicing PlasmaTherm DRIE systems

[Hollingshead, Dave]

Fubo et al,

We have also recently been having some issues with responsiveness and communication from PlasmaTherm. In this case we are dealing with tool upgrades/installation so we don’t necessarily have the option of going to a third party, but wanted to share our difficulties. I would also be interested in hearing if others have been having similar experiences or have any suggestions.

Thanks,
-Dave
Dave Hollingshead
Manager, Research Operations

The Ohio State University
Nanotech West Labs
Suite 100, 1381 Kinnear Rd, Columbus, OH 43212
614.292.1355 Office
hollingshead.19 at osu.edu<mailto:hollingshead.19 at osu.edu> / nanotech.osu.edu<http://nanotech.osu.edu>

Pronouns: he/him/his



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Football
Sent: Thursday, January 26, 2023 16:45
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] third party companies for servicing PlasmaTherm DRIE systems

Dear all, We are having trouble getting PlasmaTherm to respond to our questions and service quote. Wanted to ask if you know of any third party companies that work on PlasmaTherm systems, specifically their DRIE tool? Thanks for any suggestions!Fubo


Dear all,



We are having trouble getting PlasmaTherm to respond to our questions and service quote. Wanted to ask if you know of any third party companies that work on PlasmaTherm systems, specifically their DRIE tool?



Thanks for any suggestions!


Fubo Rao, Ph.D.,
Nanofabrication Cleanroom Manager,
Center for Nanoscale Materials,
Argonne National Laboratory
9700 S. Cass Ave, Lemont, IL 60439
Phone: 630-252-5708
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20230224/bb6cbc0d/attachment.html>