[labnetwork] Treating silane exhaust from PECVD

[Iulian Codreanu]

Hi Hadi,

I've been using dry, resin-based scrubbers provided by Jupiter 
Scientific. They are relatively small, affordable, and easy to 
operate/maintain.

Cheers,

Iulian

iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu

On 1/12/2023 2:35 PM, Hadi Esmaeilsabzali wrote:
>
> Dear Colleagues,
>
> For those who run PECVD at their facilities, I am wondering how you 
> process the exhaust from your systems.
>
> We used to treat the PECVD exhaust along with that of the SiNx tube 
> furnace through a TPU. We have recently decommissioned our furnace 
> and TPU as they were too costly to run and are looking at alternative 
> exhaust options for the PECVD only. We use our PECVD tool for oxide 
> and nitride deposition, and it's worth noting that it only uses silane 
> (no ammonia).
>
> Some colleagues had mentioned that they don't use a TPU/scrubber and 
> send the process waste to the building exhaust (untreated). Given that 
> our PECVD processes use a relatively small silane flow (~30 sccm for 
> up to 30 mins per run each week - all max values) and it is 
> significantly diluted, this sounded a practical option.I am trying to 
> see if others have tried or can comment on this approach, 
> particularly for a silane-based PECVD process. Aside from the 
> flammability concerns, we are also aware of the potential oxide 
> buildup in the exhaust system over time.
>
> I appreciate it if you share other (cost-effective) suggestions you 
> might have for us!
>
> Thanks,
> Hadi
>
> *Hadi Esmaeilsabzali, PhD*
>
> Nanofabrication Group Manager, 4D LABS
>
> Simon Fraser University
>
> 8888 University Dr., Burnaby, B.C. V5A 1S6
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