[labnetwork] Treating silane exhaust from PECVD

[J_Hagopian]

Hadi,

I purchased a pyrolyzer from CVD systems for use with our CVD system.  It is a very capable system and was never activated.  We are considering selling it  a 15% discount to our cost of $20K.  Let me know if you are interested and I will send you the spec.

John

> On Jan 12, 2023, at 2:35 PM, Hadi Esmaeilsabzali <hadi_esmaeilsabzali at sfu.ca> wrote:
> 
> Dear Colleagues,
> 
> For those who run PECVD at their facilities, I am wondering how you process the exhaust from your systems. 
> 
> We used to treat the PECVD exhaust along with that of the SiNx tube furnace through a TPU. We have recently decommissioned our furnace and TPU as they were too costly to run and are looking at alternative exhaust options for the PECVD only. We use our PECVD tool for oxide and nitride deposition, and it's worth noting that it only uses silane (no ammonia).
> 
> Some colleagues had mentioned that they don't use a TPU/scrubber and send the process waste to the building exhaust (untreated). Given that our PECVD processes use a relatively small silane flow (~30 sccm for up to 30 mins per run each week - all max values) and it is significantly diluted, this sounded a practical option. I am trying to see if others have tried or can comment on this approach, particularly for a silane-based PECVD process. Aside from theflammability concerns, we are also aware of the potential oxide buildup in the exhaust system over time. 
> 
> I appreciate it if you share other (cost-effective) suggestions you might have for us! 
> 
> Thanks,
> Hadi
> 
> Hadi Esmaeilsabzali, PhD
> Nanofabrication Group Manager, 4D LABS
> Simon Fraser University
> 8888 University Dr., Burnaby, B.C. V5A 1S6
> T: 778.782.3790 | F: 778.782.3765 | www.4dlabs.ca <http://www.4dlabs.ca/>
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> 
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