[labnetwork] Cl2, BCl3 and Silane sensors for toxic gas monitoring

[Iulian Codreanu]

Hi Aju,

At UD I have gas sensors in the exhaust of gas cabinets, valve manifold 
boxes, and tool MFC boxes as well as ambient sensors in the areas where 
the operators are present (but no ambient sensors in the chases). Toxic 
and flammable gases are transported via double wall tubing.

Cheers,

Iulian


iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu

On 1/13/2023 12:48 PM, Aju Jugessur wrote:
>
> Hi all,
>
> We have ICP etcher and PECVD that use toxic gases such as Cl2, BCl3 
> and Silane. The exhausts from the pumps are connected to a scrubber 
> and ph neutralization/acid waste system.
>
> I am reaching out to get some advice on the specific locations of the 
> Honeywell Midas sensors that we use, to detect any gas leak at the 
> etchers and toxic gas monitoring system. We have sensors at the gas 
> cabinets and ambient sensors at the tools.
>
> However, there seems to be a disagreement between our design team and 
> our EHS unit. The design team recommends having the sensors in the gas 
> pods, where the leaks are most likely to occur. EHS would like to have 
> the ambient sensors at the tools, in the breathing zone areas. As per 
> local code requirements, sensors in the gas pods satisfies the safety 
> requirements.
>
> I would like to know what your set-up of the sensor locations for 
> similar instruments is that you may have in your facility.
>
> Any insights based on experience will be super helpful.
>
> Thanks so much,
>
> Aju
>
> Aju Jugessur Ph.D. IEEE Sr. Member
>
> Director, Colorado Shared**Instrumentation
>
> in Nanofabrication and Characterization (COSINC) Facility
>
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>
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>
> E-mail: aju.jugessur at colorado.edu <mailto:aju.jugessur at colorado.edu>
>
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>
> www.colorado.edu/facility/cosinc <http://www.colorado.edu/facility/cosinc>
>
> (MBA candidate, CU, Class of 2023)
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