[labnetwork] Sensors for DES (diethylsilane)

Beaudoin, Mario beaudoin at physics.ubc.ca
Fri Jan 20 16:19:17 EST 2023


Hello All,

We use DES (diethylsilane) as our silicon precursor in our Trion PECVD 
system.   The company we deal with for sensors is asking 10K$ for a 
sensor that will need to recalibrated yearly and replaced after 2 
years.  Quite steep in our opinion.  As our DES cylinder spends roughly 
95% of the time closed, I'd like to find a less expensive option.  For 
example, even a handheld unit that I would only use when DES is in use.

Thanks all,

Mario

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