[labnetwork] question about Liner for Ni Ebeam Evaporation

[Demis D. John]

According to the Lesker table:
https://www.lesker.com/newweb/deposition_materials/materialdepositionchart.cfm?pgid=0&mobile

*Alloys with W/Ta/Mo*
Which explains the “melted” walls.

*E-Beam Performance:*Excellent
*Liner Material:*FABMATE®‡, Copper
(I think Fabmate is graphite if I remember correctly.)

What rates are you evaporating at, and how does the soak time look?
I prefer something like a 1-2min ramp up to temp, and the %power at Soak 1
should be equivalent to something like ~1-2Å/sec.
Then cool down to a power that produces ~0Å/sec (eg. 0.1) but is still hot,
before the shutter opens.
To get the graphite crucible working, Maybe try lower rates eg. 1-2Å/sec.

I hope that helps.

-- Demis (contact info <https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John>)
*Reminder*: The NanoFab has a publications policy
<https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab>


On Wed, Dec 4, 2024 at 05:36 shokoofe haghighi <shokoofe_haghighi at yahoo.com>
wrote:

> Hi, hope you are having good days,
>
> this is Haghighi, working on metallization by a PVD, using thermal and
> Ebeam evaporation.
>
> I have some issues choosing the right liner for Ni Ebeam evaporating, hope
> you find time to guide me through it.
> We have tested graphite, glassy carbon coated graphite, Al2O3, Mo, W and
> Cu liners so far.
>     Graphite liner just broke after first run from the border line of Ni
> surface. Glassy carbon coated graphite was more or less the same,
>     Al2O3 endured for 4-5 runs before breaking but there were cracks on
> it,
>     Mo liner totally melted and some kind of alloy was produced,
>     W and Cu endured but their internal walls were some how melted and we
> can't be sure about pureness of evaporated Ni and final produced thin films.
>
> do you have any other suggestions?
>
>
> high voltage: 6.1 KV
> emission current: 3 - 5 A
>
>
> Thanks for your time and attention in advance, I hope you kindly find time
> and consider replying me,
>
> Dr. Haghighi
>
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