[labnetwork] question about Liner for Ni Ebeam Evaporation

[Kevin Owen]

Haghighi,

For e-beam evaporation, we run Ni directly in the pocket. It stays in a
nice ball and is easily removed (as opposed to wetting and adhering to the
hearth). I have not tried thermal evaporation with Ni.

-Kevin

On Wed, Dec 4, 2024 at 11:46 AM Bernhard Reineke <
bernhard.reineke at uni-paderborn.de> wrote:

> Hi Haghighi,
>
> we tried this once, same result. All liners will crack. Lesker has some
> recommendations on Ebeam evaporation of Ni: slow power ramp up and down
> (works well to prevent cracking for ~2-4 Runs, with fabmate). A Cu liner
> should work better but we never tested that.
>
>
> https://www.lesker.com/newweb/deposition_materials/depositionmaterials_evaporationmaterials_1.cfm?pgid=ni1
>
> Best,
>
> Bernhard
> ------------------------------
> *Von:* labnetwork <labnetwork-bounces at mtl.mit.edu> im Auftrag von
> shokoofe haghighi <shokoofe_haghighi at yahoo.com>
> *Gesendet:* Mittwoch, 4. Dezember 2024 10:35:19
> *An:* labnetwork at mtl.mit.edu
> *Betreff:* [labnetwork] question about Liner for Ni Ebeam Evaporation
>
> Hi, hope you are having good days,
>
> this is Haghighi, working on metallization by a PVD, using thermal and
> Ebeam evaporation.
>
> I have some issues choosing the right liner for Ni Ebeam evaporating, hope
> you find time to guide me through it.
> We have tested graphite, glassy carbon coated graphite, Al2O3, Mo, W and
> Cu liners so far.
>     Graphite liner just broke after first run from the border line of Ni
> surface. Glassy carbon coated graphite was more or less the same,
>     Al2O3 endured for 4-5 runs before breaking but there were cracks on
> it,
>     Mo liner totally melted and some kind of alloy was produced,
>     W and Cu endured but their internal walls were some how melted and we
> can't be sure about pureness of evaporated Ni and final produced thin films.
>
> do you have any other suggestions?
>
>
> high voltage: 6.1 KV
> emission current: 3 - 5 A
>
>
> Thanks for your time and attention in advance, I hope you kindly find time
> and consider replying me,
>
> Dr. Haghighi
>
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