[labnetwork] Abatement for E-Beam Evaporation of Metal Oxides

[James Grant]

Hello,

Been enjoying the recent debate around electron beam evaporation of metals. Lots of food for thought.

I have another question centred around electron beam evaporation of metal oxides such as TiO2, SiO2, MoO3 and V2O5. We are curious how others are abating these materials? At the moment the exhaust from our process chamber backing pump is sent directly into our mezzanine which is, um well, not at all good. We are looking to tie in with dry bed chemisorption system that is used for a few of our etch tools but we were told by the abatement system vendor that it may not be possible.

Could people please share how they are abating their metal oxide evaporator systems?

Cheers,
James
Dr. James Paul Grant
JWNC Head of Research Technology
Engineering and Process Team
james.grant at glasgow.ac.uk<mailto:james.grant at glasgow.ac.uk>
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