[labnetwork] Abatement for E-Beam Evaporation of Metal Oxides

[Yakimov, Michael]

Why would you want a chemical abatement for evaporator??
All those things you mention do not have significant vapor pressure at room temperature, and might only be a problem as fine dust.
If anything, abrasive damage to the pump from those particles may be a concern, depending on pump type.
I would consider particle traps before and/or after the pump. if desired.  Running exhaust through an air purifier type of filter may be a cheaper one.


Thanks

mike




_______________________________________________

Michael Yakimov

Research scientist

Department  of Nanoscale Science and Engineering

University at Albany - State University of NY



253 Fuller rd.

Albany NY 12203



Phone: 518-437-8609 lab

e-mail: myakimov at albany.edu

________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of James Grant <James.Grant at glasgow.ac.uk>
Sent: Monday, December 16, 2024 4:49 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Abatement for E-Beam Evaporation of Metal Oxides


Hello,



Been enjoying the recent debate around electron beam evaporation of metals. Lots of food for thought.



I have another question centred around electron beam evaporation of metal oxides such as TiO2, SiO2, MoO3 and V2O5. We are curious how others are abating these materials? At the moment the exhaust from our process chamber backing pump is sent directly into our mezzanine which is, um well, not at all good. We are looking to tie in with dry bed chemisorption system that is used for a few of our etch tools but we were told by the abatement system vendor that it may not be possible.



Could people please share how they are abating their metal oxide evaporator systems?



Cheers,

James

Dr. James Paul Grant

JWNC Head of Research Technology

Engineering and Process Team

james.grant at glasgow.ac.uk<mailto:james.grant at glasgow.ac.uk>

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