[labnetwork] Carbon Targets in Sputter

[Matthias Pleil]

Hello LabNetwork folks,

I have a user that wishes to use a carbon target in our sputter tool.  I have a couple of questions:

  1.
What, if any, concerns should we have regarding cross-contamination.  We typically use the sputter tool for metals and dielectrics.
  2.
Any suggestions, lessons learned if you have used such targets in the past.

Greatly appreciate any input you can provide.  Thanks!


Kind Regards,

Matthias Pleil, Ph.D.
Director Manufacturing Engineering Program
UNM MTTC Cleanroom Manager
Research Professor & Senior Lecturer III of Mech. Eng - UNM
PI - NSF Support Center for Microsystems Education




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