[labnetwork] Carbon Targets in Sputter

[Demis D. John]

Hey Matt,
We have done Carbon Dep in our E-Beams (not sure about sputter), and I can
tell you that, because it doesn't adhere well to the metals typically dep'd
in our EBeams, thick layers can cause flaking from chamber tooling sooner
than expected.
However, Thin layers (~20nm) have generally not been an issue. For thicker
layers (something like >200nm?) required us to schedule tooling PM right
after the dep.

We have not had any mention of contamination as far as I know, from users
that use the tools.  Many of the eBeam crucible liners are graphite as
well, so I suppose Carbon is already present in those chambers.

-- Demis (contact info <https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John>)
*Reminder*: The NanoFab has a publications policy
<https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab>


On Wed, Jul 17, 2024 at 5:05 AM Matthias Pleil <mpleil at unm.edu> wrote:

> Hello LabNetwork folks,
>
> I have a user that wishes to use a carbon target in our sputter tool.  I
> have a couple of questions:
>
>    1. What, if any, concerns should we have regarding
>    cross-contamination.  We typically use the sputter tool for metals and
>    dielectrics.
>    2. Any suggestions, lessons learned if you have used such targets in
>    the past.
>
>
> Greatly appreciate any input you can provide.  Thanks!
>
>
> Kind Regards,
>
> Matthias Pleil, Ph.D.
> Director Manufacturing Engineering Program
> UNM MTTC Cleanroom Manager
> Research Professor & Senior Lecturer III of Mech. Eng - UNM
> PI - NSF Support Center for Microsystems Education
>
>
>
>
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