[labnetwork] Carbon Targets in Sputter

[Kevin M McPeak]

Dear Matthias,

I would recommend using a pyrolitic graphite target. The result in far less unwanted fine particulate compared to the standard carbon target. They are significantly more expensive. We buy ours from ACI Alloys.

Regards,
Kevin

________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Matthew Moneck <mmoneck at andrew.cmu.edu>
Sent: Wednesday, July 17, 2024 6:45:32 PM
To: Matthias Pleil <mpleil at unm.edu>
Cc: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Carbon Targets in Sputter

Hi Matthias,

We have done a lot of carbon sputtering and the only real issue we encounter is particulate.  The sputtered carbon can have poor adhesion.  Therefore, it tends to flake off of shields and other components coated during sputtering, ultimately forming fine particulate.  We only allow it in one tool for that reason.  That tool also has very good target isolation and shielding, so the particulate we form stays concentrated mainly to that target area, minimizing the risk of cross-contamination.

Best Regards,

Matt

On Wed, Jul 17, 2024 at 8:06 AM Matthias Pleil <mpleil at unm.edu<mailto:mpleil at unm.edu>> wrote:
Hello LabNetwork folks,

I have a user that wishes to use a carbon target in our sputter tool.  I have a couple of questions:

  1.
What, if any, concerns should we have regarding cross-contamination.  We typically use the sputter tool for metals and dielectrics.
  2.
Any suggestions, lessons learned if you have used such targets in the past.

Greatly appreciate any input you can provide.  Thanks!


Kind Regards,

Matthias Pleil, Ph.D.
Director Manufacturing Engineering Program
UNM MTTC Cleanroom Manager
Research Professor & Senior Lecturer III of Mech. Eng - UNM
PI - NSF Support Center for Microsystems Education




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Matthew T. Moneck, Ph.D
Executive Director, Claire & John Bertucci Nanotechnology Laboratory
Electrical & Computer Engineering | Carnegie Mellon University
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Phone: 412-268-5430
ece.cmu.edu<http://ece.cmu.edu/>
nanofab.ece.cmu.edu<http://nanofab.ece.cmu.edu/>

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