[labnetwork] Carbon Targets in Sputter

[Matthew Moneck]

Hi Matthias,

We have done a lot of carbon sputtering and the only real issue we
encounter is particulate.  The sputtered carbon can have poor adhesion.
Therefore, it tends to flake off of shields and other components coated
during sputtering, ultimately forming fine particulate.  We only allow it
in one tool for that reason.  That tool also has very good target isolation
and shielding, so the particulate we form stays concentrated mainly to that
target area, minimizing the risk of cross-contamination.

Best Regards,

Matt

On Wed, Jul 17, 2024 at 8:06 AM Matthias Pleil <mpleil at unm.edu> wrote:

> Hello LabNetwork folks,
>
> I have a user that wishes to use a carbon target in our sputter tool.  I
> have a couple of questions:
>
>    1. What, if any, concerns should we have regarding
>    cross-contamination.  We typically use the sputter tool for metals and
>    dielectrics.
>    2. Any suggestions, lessons learned if you have used such targets in
>    the past.
>
>
> Greatly appreciate any input you can provide.  Thanks!
>
>
> Kind Regards,
>
> Matthias Pleil, Ph.D.
> Director Manufacturing Engineering Program
> UNM MTTC Cleanroom Manager
> Research Professor & Senior Lecturer III of Mech. Eng - UNM
> PI - NSF Support Center for Microsystems Education
>
>
>
>
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-- 

--
Matthew T. Moneck, Ph.D
Executive Director, Claire & John Bertucci Nanotechnology Laboratory
Electrical & Computer Engineering | Carnegie Mellon University
5000 Forbes Avenue, Pittsburgh, PA 15213-3890
Phone: 412-268-5430
ece.cmu.edu
nanofab.ece.cmu.edu
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