[labnetwork] Metal in our DRIE

[McKenna, Curtis]

Hi Labnetwork,

We recently purchased a new DRIE and are left without any users for our older but still functional STS Multiplex ASE.  We are currently debating selling off the tool or turning it into a "dirty" tool and allowing metals inside the chamber, which has been a commonly requested process for as long as we have had it.  I'm curious if anyone else has tried this with their DRIE and what kind of results you saw regarding the long-term viability of the tool.


Curt McKenna
Facilities Manager, Micro/Nano Technology Center
University of Louisville
2210 South Brook Street
Shumaker Research Building, Room 232
Louisville, KY  40292
http://louisville.edu/micronano/<http://louisville.edu/micronano>


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