[labnetwork] Metal in our DRIE

[Khanna, Rohit]

Hi Curt,
                 Hope you are doing well. If for any reason you end up wanting to get rid of the machine do let us know as we are struggling with out old STS tool and may be interested to buy yours either for repairing ours or as a direct replacement. If possible kindly share a picture of your existing STS tool, just for our information which brand and model RIE did you buy and what was the approximate cost (is sharing cost is not a problem). As far as I am aware STPS/STS has been bought over by KLA Tencor and they don't make machines for university research environment any more (kindly correct me if I am aware if they still do).

Warm Regards
Rohit Khanna
Electronic Test & Measurement Engineer
London Centre for NANO Technology, UCL
Ph:+44-020-76799984
Lab: +44 20 3108 1516
Int Ext: 39984

________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of McKenna, Curtis <curtis.mckenna at louisville.edu>
Sent: 24 July 2024 15:30
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Metal in our DRIE


⚠ Caution: External sender


Hi Labnetwork,



We recently purchased a new DRIE and are left without any users for our older but still functional STS Multiplex ASE.  We are currently debating selling off the tool or turning it into a “dirty” tool and allowing metals inside the chamber, which has been a commonly requested process for as long as we have had it.  I’m curious if anyone else has tried this with their DRIE and what kind of results you saw regarding the long-term viability of the tool.





Curt McKenna

Facilities Manager, Micro/Nano Technology Center

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 232

Louisville, KY  40292

http://louisville.edu/micronano/<http://louisville.edu/micronano>




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