[labnetwork] HMDS Detection

[Collins, Deon]

DOD offers a PS-7 gas monitor that have multiple cartridges available. The TWA for hdms is 10ppm(which is a low allotment) so an electromatic sensor will do in this case. NH3 will have a crossover for Hdms. You will need to replace and PM the sensor every 18 months.

Deon D. Collins


Director of Facilities
The Grainger College Of Engineering UIUC
Holonyak Micro & Nanotechnology Lab
208 N Wright St Rm. 1114 | MC-249
Urbana, IL 61801
217-300-7531 | deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>


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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Mark Dye
Sent: Monday, July 29, 2024 5:57 PM
To: Steven Spalsbury <spals at uw.edu>
Cc: labnetwork at mtl.mit.edu; Art Beverleigh <artb at mdcsystemsinc.com>
Subject: Re: [labnetwork] HMDS Detection

Contact Art Beverleigh from MDC

http://mdcsystemsinc.com/<https://urldefense.com/v3/__http:/mdcsystemsinc.com/__;!!DZ3fjg!5YGwzADA8cyofsOxX2Ng8dkEOB8iLvUmHAv_IPB3wMPtLKqvk25de8WQG6Zl4ZZRHwbEkjU6buYIPaGEmWUT$>
Best Regards,

Mark M. Dye
Director of Marketing and Business Development
SilPac
408-768-1362


On Jul 29, 2024, at 3:06 PM, Steven Spalsbury <spals at uw.edu<mailto:spals at uw.edu>> wrote:

Hello Lab Network,

Is anyone aware of a sensor that can detect HMDS vapor leaks?


Thank you,

Steven Spalsbury
Equipment Engineer
Washington Nanofabrication Facility (WNF)
University of Washington
spals at uw.edu<mailto:spals at uw.edu>
https://www.wnf.washington.edu/<https://urldefense.proofpoint.com/v2/url?u=https-3A__www.wnf.washington.edu_&d=DwMFAg&c=euGZstcaTDllvimEN8b7jXrwqOf-v5A_CdpgnVfiiMM&r=91kK0c-DN6w-PsAvqN051JsgaTljpCwfnNeQXBBm-IE&m=nMpw1E6GGUo_xTFSfkpezSkcT-uwfjmn8Hi8Bxqb32OFYuO80a7rGKwodyFtNktS&s=16bgl2LqZsl_Dx6z_eodhGi6ULYl7oGR-e9AZ1ZBIEg&e=>
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