[labnetwork] HMDS Detection

[Iulian Codreanu]

I use NH3 sensors.

iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
https://udnf.udel.edu

On 7/29/2024 2:00 PM, Steven Spalsbury wrote:
>
> Hello Lab Network,
>
> Is anyone aware of a sensor that can detect HMDS vapor leaks?
>
> Thank you,
>
> Steven Spalsbury
>
> Equipment Engineer
>
> Washington Nanofabrication Facility (WNF)
>
> University of Washington
>
> spals at uw.edu <mailto:spals at uw.edu>
>
> https://www.wnf.washington.edu/ <https://www.wnf.washington.edu/>
>
>
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