[labnetwork] Photomask sticks to SU8

[Greg Allion]

Acetone will work if it's still tacky like that and you wipe it immediately.
Looks like you tried edge bead removal, so yes, baking it for longer is
your best bet.
In a fit or rage, I once just put an SU-8 wafer in our oven that sits at
90C for like 8 hours and it worked beautifully.  It didn't even think about
sticking to the mask.  I'm sure I could have even used hard contact.  This
was after edge bead removal and the normal 40min hot plate bake.
I think the initial soft bake is very forgiving.  All the magic is
happening during the post bake.
Good luck,
Greg

On Fri, Jun 7, 2024 at 7:51 PM Chang, Long <lvchang at central.uh.edu> wrote:

> Hello,
>
> I just used Quartz Cr photomask for the first time with SU8 3050 and the
> SU8 stuck to the photomask after exposure, see photo. How can I prevent SU8
> from sticking to my mask? How should I clean the mask?
>
> Thanks,
> Long Chang
> UH Nanofabrication Facility
> Houston, TX
> lvchang at central.uh.edu
>
>
>
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-- 
Greg Allion
NC State University Nanofabrication Facility (NNF)
Process Integration Engineering Manager

Monteith Research Center
2410 Campus Shore Drive rm.243C
Raleigh, NC 27606
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