[labnetwork] VO2 deposition

[Martin, Michael]

Hi gang,
    I believe this question has been raised before on this forum but I'm not sure there were many clear answers.  I have a user that is interested in depositing vanadium oxide (VO2) and was wondering if anyone can provide guidance on how you deposit vanadium oxide safely in a multi-user tool.  I think most institutions are depositing this from vanadium metal reactively, but we'd like to hear how labs deal with the possibility of contamination from the other toxic oxidation states.  How do you safely clean your chamber?  What steps do you use to keep users safe when they are using the sputtering tool after VO2 deposition?  Are there any other protocols you have in place for VO2?  Are the concerns regarding V2O5 just overblown?


Regards,

   Michael Martin, Ph.D.


Engineering Senior Researcher

Micro/Nano Technology Center

University of Louisville

(502) 552-1945

Web page<https://louisville.edu/micronano> Instagram<https://www.instagram.com/micronanolouisville/> Facebook<https://www.facebook.com/MNTCUOFL/> YouTube<https://www.youtube.com/channel/UCGiczmq6wVIBJlM7UEGVW9Q> TikTok<https://www.tiktok.com/@micronanolouisville?is_from_webapp=1&sender_device=pc>

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