[labnetwork] VO2 deposition

[Iulian Codreanu]

Hi Michael,

We use a pulsed laser deposition tool for this material and other 
oxides. We have both VO2 and V2O5 targets. The sample holder is heated 
and we flow a bit of O2 into the chamber during the deposition.

Iulian

iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
https://udnf.udel.edu

On 5/9/2024 12:28 PM, Martin, Michael wrote:
> Hi gang,
>     I believe this question has been raised before on this forum but 
> I'm not sure there were many clear answers.  I have a user that is 
> interested in depositing vanadium oxide (VO2) and was wondering if 
> anyone can provide guidance on how you deposit vanadium oxide safely 
> in a multi-user tool.  I think most institutions are depositing this 
> from vanadium metal reactively, but we'd like to hear how labs deal 
> with the possibility of contamination from the other toxic oxidation 
> states.  How do you safely clean your chamber?  What steps do you use 
> to keep users safe when they are using the sputtering tool after VO2 
> deposition?  Are there any other protocols you have in place for VO2?  
> Are the concerns regarding V2O5 just overblown?
>
> Regards,
>
>    Michael Martin, Ph.D.
>
>
> Engineering Senior Researcher
>
> Micro/Nano Technology Center
>
> University of Louisville
>
> (502) 552-1945
>
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