[labnetwork] openload PECVD?

[Russ Renzas]

Has anyone worked with openload PECVD systems? How did that go, are there ways of running SiO2, SiN without silane-related disasters, e.g. using dilute silane?

My CVD money got allocated elsewhere in the way universities do, so I'm considering my options.

Russ Renzas, Ph.D.
Director, Davidson Foundation Cleanroom
College of Engineering
University of Nevada, Reno
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