[labnetwork] Cambridge nanotech Savannah S100 filter unit and oil pump trap

[Mac Hathaway]

Hi Gehmyeong,

Mac Hathaway here, at Harvard CNS.

The Edwards part you mention is actually the pirani pressure guage.  We 
buy them direct from Edwards.

For the foreline trap, we are using a Nor-Cal part FCT-6-1002-NWB.  
Nor-Cal is under new ownership, I believe, but the part number is still 
be valid, last I checked.  It is not exactly conical, but it works.

Let me know if this would suit you and, if so, let me know offline if 
you would like some of the related part numbers.


Mac



Mac Hathaway

Senior Process and Systems Engineer

Harvard Center for Nanoscale Systems

11 Oxford St.

Cambridge, MA02138

617-495-9012

On 11/8/2024 8:06 AM, Gohmyeong Bae wrote:
> Dear Lab Network,
>
> We have one of Cambridge nanotech Savannah S100 ALD system inside of 
> our nano fabrication center.
>
> I am seeking for the EDWARDS APGX-H NW16 ST/ST filter unit and oil 
> fore line trap(NW25) with conical shape.
>
> Can I get any information about these or get some service engineer 
> contact point for entire system overhaul?
>
> Thank you.
>
> Best regards,
> Gohmyeong Bae.
>
> *Gohmyeong Bae, M. S.*
> He/Him/His
> *Institute of Applied Life Science (IALS)*
> *Cleanroom Facility Manager for Nano and Device Fabrication Cleanroom*
> Conte building B111, Marcus Hall 25
> Amherst, MA 01003
> *413-472-1570*
> *gohmyeongbae at umass.edu*
>
>
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