[labnetwork] Depositing dense amorphous silicon films

[Richelson, Tucson]

Hello,

I have a student that is looking to deposit dense amorphous silicon films. Previously he used the CHA at 25 A/s. Unfortunately, my CHA is getting more and more expensive to repair. Does anyone else have any suggestions on alternative methods or tools?


Best,
Tucson Richelson
Cleanroom Engineer

The Grainger College of Engineering
Holonyak Micro and Nanotechnology Lab

Room 2118
208 N Wright St
Urbana, IL 61801
tucsonr at illinois.edu<mailto:tucsonr at illinois.edu>
Office: +1 (217) 244-5138
Web: http://mntl.illinois.edu/
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Give me feedback: https://forms.office.com/r/GawstR26J7

[University of Illinois Urbana-Champaign wordmark]<http://illinois.edu/>

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