[labnetwork] SU-8 distributors (Kayaku ending SU-8 2000 series early 2025)

Thu Oct 24 09:40:38 EDT 2024

Hi Ben,
At Ohio State, we have started evaluating SU-8 3000 and another one (need verify with the engineer on the project) for an external customer.  So far, they were ok for our needs, which were just sidewall passivation for devices.  I realize that isn’t super helpful, but we are in the same boat as you are, trying to determine which way to go.

The alternate source that I am aware of is KemLab<https://www.kemlab.com/> in Mass.  Jeremy Golden (Jeremy Golden jgolden at kemlab.com<mailto:jgolden at kemlab.com>)  is the General Manager (and I believe co-founder).  He is a resist chemist and was for years at Microchem in charge of SU-8 and PMMA, among other things.  We had a lengthy discussion about the options for SU-8.  I highly recommend talking to him about alternatives. He’s great to deal with and explains the chemistry, challenges, etc.  We asked Kayaku for information and they just sent me all the data sheets and SDS, with no other information or recommendations.

The main issue I believe is that none of the alternatives, neither from KemLab nor Kayaku, can cover all thickness ranges with one formulation yet. My guess is that is because of the surfactant, which is also my guess why the 2000 series is going away.  So, unlike the 2000 series there will likely be a different solution for thin, moderate, thick films.

We only stock 2005 for our users, but we have numerous users that buy their own thicker and thinner SU-8.  We also use it both on our contact aligners and our MLA150, so we are interested in how the alternatives behave at 365-375nm or 405nm.   I’d love to hear what others are doing and any data you’d be willing to share.

Best,
Aimee Bross Price

Manager, Nanofabrication
The Ohio State University
Nanotech West Lab
Institute for Materials Research
1381 Kinnear Road
Suite 100
Columbus, OH 43212
614-292-2753
Price.798 at osu.edu<mailto:Price.798 at osu.edu>
Nanotech.osu.edu
Pronouns: she/her/hers

Conference Chair, 67th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication (EIPBN)
La Jolla, California May 28-31, 2024
| https://eipbn.org<https://eipbn.org/> |

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Schmidt, Benjamin Willis
Sent: Wednesday, October 23, 2024 4:39 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] SU-8 distributors (Kayaku ending SU-8 2000 series early 2025)

Hello labnetwork, I have two questions: We recently received notice from Kayaku Advanced Materials they would stop distribution of SU-8 2000 series resists in early 2025. Is anyone aware of alternate suppliers? They have recommended new options

Hello labnetwork,

I have two questions:

  1.  We recently received notice from Kayaku Advanced Materials they would stop distribution of SU-8 2000 series resists in early 2025.  Is anyone aware of alternate suppliers?
  2.  They have recommended new options based on desired thickness: <10 um (SU-8 3000, SU-8 TF 6000 series), 10 – 50 um (SU-8 3000 series), >50 um (SU-8 XFT75, SU-8 XFT100). Does anyone have experience with these in comparison to the 2000 series?  We assume we would need to redo our recipes but hoped to get some general insight from others.

Lastly, I used nanobot.chat to find a previous thread in the labnetwork archives from 2021.  Is there a way to reply directly to that thread to keep the conversation together?  I couldn’t find anything so that’s why I’m starting a fresh one now.
https://mtl.mit.edu/pipermail/labnetwork/2021-January/004537.html<https://urldefense.com/v3/__https:/mtl.mit.edu/pipermail/labnetwork/2021-January/004537.html__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZPE4znzDA$>

Thanks for your help,
Ben

[Vanderbilt]

Ben W. Schmidt, Ph.D.
Cleanroom Manager
Vanderbilt Institute of Nanoscale Science and Engineering
Vanderbilt University, Nashville, TN
615.875.9294 | ben.schmidt at vanderbilt.edu<mailto:ben.schmidt at vanderbilt.edu> | vu.edu/vinse<https://urldefense.com/v3/__https:/www.vanderbilt.edu/vinse/__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZOiJtPYWA$>
Book time with Schmidt, Benjamin Willis <https://urldefense.com/v3/__https:/outlook.office.com/bookwithme/user/4be23d791b054cfab7650ff91ba047e2@Vanderbilt.Edu?anonymous&ep=pcard__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZOjLhItGg$>

 [Twitter] <https://urldefense.com/v3/__https:/twitter.com/VanderbiltVinse__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZPz5vhK6g$>  [Facebook] <https://urldefense.com/v3/__https:/www.facebook.com/VINSE.Vanderbilt__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZOtiJgsig$>  [Instagram] <https://urldefense.com/v3/__https:/www.instagram.com/vinsetagram/__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZPBVtBacw$>  [LinkedIn] <https://urldefense.com/v3/__https:/www.linkedin.com/company/vinse/__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZNC3CDVEQ$>  [YouTube] <https://urldefense.com/v3/__https:/www.youtube.com/playlist?list=PLB1EPeYUwa4mwVbt2dweqUzD8Xy2ZWgeT__;!!KGKeukY!07qLgW2jcUyrxsz0UVSyCrIxeV9HIAs6bro2cpqVxwlqGUAXuDJSwvS6Wsb2MKISabPMmpSxulSUJLJTQ5QeYyKRcZOijLiArA$>

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20241024/e73a0b38/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image001.png
Type: image/png
Size: 10049 bytes
Desc: image001.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20241024/e73a0b38/attachment.png>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image002.png
Type: image/png
Size: 1359 bytes
Desc: image002.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20241024/e73a0b38/attachment-0001.png>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image003.png
Type: image/png
Size: 951 bytes
Desc: image003.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20241024/e73a0b38/attachment-0002.png>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image004.png
Type: image/png
Size: 1387 bytes
Desc: image004.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20241024/e73a0b38/attachment-0003.png>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image005.png
Type: image/png
Size: 1109 bytes
Desc: image005.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20241024/e73a0b38/attachment-0004.png>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: image006.png
Type: image/png
Size: 752 bytes
Desc: image006.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20241024/e73a0b38/attachment-0005.png>