[labnetwork] PDMS processing - separate lab?

[Michael Robles]

Hi Dan,

We also have a separate PDMS room with special protocols, training, and access restrictions. It's sort of an "all purpose" room for messy processes that may affect tools in the main cleanroom. We also forbid it in the main cleanroom.

That said, in my industry past, I used to run PDMS in the same small room as my litho steps and didn't have any issues. But I was the only person working in the room and I wiped every surface and vacuumed every day. It can be done but I can't imagine it working in a busy shared space.

Regards,
Michael



Michael Robles (He/Him)
Senior Photolithography Process Engineer
Stanford Nanofabrication Facility (SNF)
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Kyle Keenan <kckeenan at seas.upenn.edu>
Sent: Wednesday, September 4, 2024 11:59 AM
To: Dan P. Woodie <daniel.woodie at princeton.edu>
Cc: Fab Network <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] PDMS processing - separate lab?

Hi Dan,

Short answer for us: we have a newly dedicated space for this in a remote part of the cleanroom. There are special protocols for using this space (special disposable gloves, blue sticky mats, signage) to minimize the impact on adjacent spaces, as well as the rest of the cleanroom.

Best,
Kyle

On Wed, Sep 4, 2024 at 2:52 PM Dan P. Woodie <daniel.woodie at princeton.edu<mailto:daniel.woodie at princeton.edu>> wrote:

Lab Network,



I am curious how many fabs allow PDMS mixing in their main cleanrooms and how many require that work done in separate isolated spaces or noncleanroom labs. My experience has been that they can be in the same space if careful glove protocols are used to avoid spreading the unpolymerized precursors around the facility, but I am interested in other’s experiences. Thanks for the shared knowledge.



Dan



Daniel Woodie

Director, Micro/Nano Fabrication Center, Princeton Materials Institute

Princeton University

155 Andlinger Center

86 Olden St

Princeton, NJ 08540



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