[labnetwork] Small footprint ALD system for Al2O3

[Moreau, Justin]

Hi Joe
At UMass Lowell we have a Cambridge (Veeco) Figi F200 ALD. It’s a bit larger than the Savannah.
Its been here about 12y and had very little downtime. The support we get from Veeco service and applications is very good.









<https://www.linkedin.com/company/umass-lowell-core-research-facilities/>[University of Massachusetts Lowell]
Justin Moreau
Director, Nanofabrication Core
CORE RESEARCH FACILITIES
ETIC
E: Justin_Moreau at uml.edu<mailto:Justin_Moreau at uml.edu>
T: 978-934-3615   M: 978-337-8148

[cid:image002.jpg at 01DB0035.AC24A130]<https://www.linkedin.com/company/umass-lowell-core-research-facilities/>

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Mac Hathaway
Sent: Thursday, September 5, 2024 4:25 PM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Small footprint ALD system for Al2O3

Hi Joe, Mac here, at Harvard CNS. We've been using two Savannahs for coming up on 17 years here. They are pretty robust and have served us well. We also have an Arradiance Gemstar which we've also had for a number of years. If I had to choose

Hi Joe,

Mac here, at Harvard CNS.

We've been using two Savannahs for coming up on 17 years here.  They are pretty robust and have served us well.

We also have an Arradiance Gemstar which we've also had for a number of years.

If I had to choose between them, I'd go with the Arradiance, but they are both pretty solid.


Mac

Mac Hathaway
Senior Process and Systems Engineer
Harvard Center for Nanoscale Systems
11 Oxford St.
Cambridge, MA  02138
617-495-9012

On 9/5/2024 2:57 PM, Joseph Losby wrote:
Hello,

Does anyone have a recommendation for a small footprint ALD system?  We are looking to deposit Al2O3 only.

Any thoughts on the Veeco Savannah<https://urldefense.proofpoint.com/v2/url?u=https-3A__www.veeco.com_products_savannah-2Dthermal-2Dald-2Dfor-2Drd_&d=DwMFAw&c=WO-RGvefibhHBZq3fL85hQ&r=TEMLD8-VsxCGtcVzmvpT5GFNSczskEKHzW6aYlttmIY&m=ODSXhzqSu__Z1FHJg-7TQfKRqo9i0kcS2MgRPzn_eQVgDFmbsKFIXyaFbLJ6BYbr&s=3uO21TSwUeJjjrZLOq5YHs4pDHwCs614Va9VNHaMtRE&e=>?

Cheers,
Joe


Joseph Losby, PhD

Manager, qLab Operations

joseph.losby at ucalgary.ca<mailto:joseph.losby at ucalgary.ca>



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