[labnetwork] How do you manage your RTA systems?

[Michael Helmbrecht]

We have 4 150 mm RTP systems with varying levels of materials allowed. One
system has 2 different chambers to distinguish between III-V and PZT.

III-V or PZT (separate chamber installed upon request) with metals
III-V no metals
non-MOS Si, Ce, and SiC, with specified metals allowed
MOS, 2 chamber system, 1 for activation, 1 for silicides

- Michael

------------------------------------------------------------------------------------------
*Michael Helmbrecht, Ph.D.* (he, him, his)
Executive Director
Berkeley Marvell Nanofabrication Laboratory
520 Sutardja Dai Hall
Berkeley, CA 94720
(510) 809-8620
https://nanolab.berkeley.edu/
------------------------------------------------------------------------------------------

On Tue, Apr 1, 2025 at 9:02 AM Philippe Mérel <Philippe.Merel at usherbrooke.ca>
wrote:

> Hello LabNetwork,
>
> We are a university cleanroom with all kinds of research projects. We
> often have to deal with visible residues, smears inside our RTA after work
> by users.
>
> I would like to know the rules you implemented on the use of your RTA
> (allowed materials and so on).
>
> Thank you.
>
> *Philippe Mérel PhD*
>
> Coordonnateur Laboratoire de Nanofabrication et de Nanocaractérisation
>  (LNN)
>
> Institut Interdisciplinaire d’Innovation Technologique – 3iT
>
> *Université de Sherbrooke*
>
> (819) 821-8000 x61941
>
>
> https://www.usherbrooke.ca/3it/
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>


-- 
------------------------------------------------------------------------------------------
*Michael Helmbrecht, Ph.D.* (he, him, his)
Executive Director
Berkeley Marvell Nanofabrication Laboratory
520 Sutardja Dai Hall
Berkeley, CA 94720
(510) 809-8620
https://nanolab.berkeley.edu/
------------------------------------------------------------------------------------------
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20250401/612ef3b0/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Outlook-gcevzln3.png
Type: image/png
Size: 212990 bytes
Desc: not available
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20250401/612ef3b0/attachment.png>