[labnetwork] Cleanroom humidity

[Alex Dixon]

For those of you with climate controls in your cleanrooms, what relative humidity do your keep your cleanroom at, and how tightly do you control the fluccuations?  How significant an effect have you seen on device performance?

Our campus facilities is doing a climate control audit and asking any lab with special requirements to justify them. Any info you could share would be appreceated.

Thanks!
-Alex

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Alex Dixon, Ph.D. (He/Him)
Lab Manager
Nanofabrication and Thin Film Deposition
Shared Instrument Facility
Colorado School of Mines

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