[labnetwork] Cleanroom humidity

Peder Lenvik plenvik at ucsb.edu
Wed Dec 17 17:04:32 EST 2025


40 to 60
Or 50 +/- 10

Peder Lenvik

Sr. Facilities Lead

Electrical and Computer Engineering
E.S.B. Bldg. #225, Room 1109F
University California Santa Barbara, Santa Barbara, Ca. 93106


On Wed, Dec 17, 2025 at 14:03 Alex Dixon <agdixon at mines.edu> wrote:

> For those of you with climate controls in your cleanrooms, what relative
> humidity do your keep your cleanroom at, and how tightly do you control the
> fluccuations?  How significant an effect have you seen on device
> performance?
>
> Our campus facilities is doing a climate control audit and asking any lab
> with special requirements to justify them. Any info you could share would
> be appreceated.
>
> Thanks!
> -Alex
>
> __________________________________________________________
>
>
> Alex Dixon, Ph.D. (He/Him)
> Lab Manager
> Nanofabrication and Thin Film Deposition
> Shared Instrument Facility
> Colorado School of Mines
>
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