[labnetwork] Cleanroom humidity

[Peder Lenvik]

For ESD control
Some processes are affected by humidity
Those processes should specify what the level should be.

Peder Lenvik

Sr. Facilities Lead

Electrical and Computer Engineering
E.S.B. Bldg. #225, Room 1109F
University California Santa Barbara, Santa Barbara, Ca. 93106


On Wed, Dec 17, 2025 at 14:04 Peder Lenvik <plenvik at ucsb.edu> wrote:

> 40 to 60
> Or 50 +/- 10
>
> Peder Lenvik
>
> Sr. Facilities Lead
>
> Electrical and Computer Engineering
> E.S.B. Bldg. #225, Room 1109F
> University California Santa Barbara, Santa Barbara, Ca. 93106
>
>
> On Wed, Dec 17, 2025 at 14:03 Alex Dixon <agdixon at mines.edu> wrote:
>
>> For those of you with climate controls in your cleanrooms, what relative
>> humidity do your keep your cleanroom at, and how tightly do you control the
>> fluccuations?  How significant an effect have you seen on device
>> performance?
>>
>> Our campus facilities is doing a climate control audit and asking any lab
>> with special requirements to justify them. Any info you could share would
>> be appreceated.
>>
>> Thanks!
>> -Alex
>>
>> __________________________________________________________
>>
>>
>> Alex Dixon, Ph.D. (He/Him)
>> Lab Manager
>> Nanofabrication and Thin Film Deposition
>> Shared Instrument Facility
>> Colorado School of Mines
>>
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>>
>
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