[labnetwork] Cleanroom humidity

[Sun, Yong]

Cleanroom humidity should be maintained at 45% +/- 5%, temperature should be 68F +/- 1F. Ideally, the temperature/humidity level in Cleanroom should not fluctuate over time.

The cleanroom tools/capabilities can start having issues if the temperature & humidity drift out of spec:
(i) Optical lithography could suffer from temperature fluctuation, e.g. patterns on the wafers/masks can shrink/expand due to thermal expansion, leading to alignment issues
(ii) Too much moisture in the cleanroom air could lead to resist adhesion problem, too little moisture in the cleanroom air could lead to ESD problem.
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Peder Lenvik <plenvik at ucsb.edu>
Sent: Wednesday, December 17, 2025 5:04 PM
To: Alex Dixon <agdixon at mines.edu>
Cc: Lab Network <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Cleanroom humidity

40 to 60
Or 50 +/- 10

Peder Lenvik

Sr. Facilities Lead

Electrical and Computer Engineering
E.S.B. Bldg. #225, Room 1109F
University California Santa Barbara, Santa Barbara, Ca. 93106


On Wed, Dec 17, 2025 at 14:03 Alex Dixon <agdixon at mines.edu<mailto:agdixon at mines.edu>> wrote:
For those of you with climate controls in your cleanrooms, what relative humidity do your keep your cleanroom at, and how tightly do you control the fluccuations?  How significant an effect have you seen on device performance?

Our campus facilities is doing a climate control audit and asking any lab with special requirements to justify them. Any info you could share would be appreceated.

Thanks!
-Alex

__________________________________________________________


Alex Dixon, Ph.D. (He/Him)
Lab Manager
Nanofabrication and Thin Film Deposition
Shared Instrument Facility
Colorado School of Mines

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