[labnetwork] Cleanroom humidity

[Marc Zuiddam]

We aim for 50%. Above 60% we clearly see adhesion problems with resist. Below 35% ESD charging is difficult to avoid.
In case you are doing DUV exposure, humidity control is even more important. Small variations can affect your exposure times.


Best regards, Met vriendelijke groet,



Marc Zuiddam | Operations manager Kavli nanolab

a: Delft University of Technology | Lorentzweg 1 | 2628 CJ Delft
e: M.R.Zuiddam at tudelft.nl<mailto:M.R.Zuiddam at tudelft.nl> | w: kavli.tudelft.nl<http://kavli.tudelft.nl/>



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________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Peder Lenvik <plenvik at ucsb.edu>
Sent: Wednesday, December 17, 2025 23:06
To: Alex Dixon <agdixon at mines.edu>
Cc: Lab Network <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Cleanroom humidity

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For ESD control
Some processes are affected by humidity
Those processes should specify what the level should be.

Peder Lenvik

Sr. Facilities Lead

Electrical and Computer Engineering
E.S.B. Bldg. #225, Room 1109F
University California Santa Barbara, Santa Barbara, Ca. 93106


On Wed, Dec 17, 2025 at 14:04 Peder Lenvik <plenvik at ucsb.edu<mailto:plenvik at ucsb.edu>> wrote:
40 to 60
Or 50 +/- 10

Peder Lenvik

Sr. Facilities Lead

Electrical and Computer Engineering
E.S.B. Bldg. #225, Room 1109F
University California Santa Barbara, Santa Barbara, Ca. 93106


On Wed, Dec 17, 2025 at 14:03 Alex Dixon <agdixon at mines.edu<mailto:agdixon at mines.edu>> wrote:
For those of you with climate controls in your cleanrooms, what relative humidity do your keep your cleanroom at, and how tightly do you control the fluccuations?  How significant an effect have you seen on device performance?

Our campus facilities is doing a climate control audit and asking any lab with special requirements to justify them. Any info you could share would be appreceated.

Thanks!
-Alex

__________________________________________________________


Alex Dixon, Ph.D. (He/Him)
Lab Manager
Nanofabrication and Thin Film Deposition
Shared Instrument Facility
Colorado School of Mines

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