[labnetwork] Cleanroom humidity

[Bulent Koroglu]

*Dear Lenvik,*

Cleanroom humidity requirements are defined based on the *process
sensitivity, installed equipment, and room volume*.
The presence of *ovens or other heat-generating equipment* can
significantly influence both *thermal load and relative humidity*, and
therefore must be taken into account during *HVAC system design, balancing,
and operation*.

>From a general cleanroom engineering perspective, *ISO Class 5 (Class 100)
and ISO Class 6 (Class 1,000)* cleanrooms are typically operated at a *relative
humidity setpoint of 45% ± 5%*, unless process-specific constraints require
otherwise.

Best regards,
*Bülent Köroğlu*

Teknik Personel

Technical Staff

<https://sunum.sabanciuniv.edu>

Üniversite Cd. No:27 Orta Mah. 34956 Tuzla Istanbul

T: 0 216 483 9540 F: 0 216 483 9885
*sunum.sabanciuniv.edu <https://sunum.sabanciuniv.edu>*


Peder Lenvik <plenvik at ucsb.edu>, 18 Ara 2025 Per, 16:19 tarihinde şunu
yazdı:

> For ESD control
> Some processes are affected by humidity
> Those processes should specify what the level should be.
>
> Peder Lenvik
>
> Sr. Facilities Lead
>
> Electrical and Computer Engineering
> E.S.B. Bldg. #225, Room 1109F
> University California Santa Barbara, Santa Barbara, Ca. 93106
>
>
> On Wed, Dec 17, 2025 at 14:04 Peder Lenvik <plenvik at ucsb.edu> wrote:
>
>> 40 to 60
>> Or 50 +/- 10
>>
>> Peder Lenvik
>>
>> Sr. Facilities Lead
>>
>> Electrical and Computer Engineering
>> E.S.B. Bldg. #225, Room 1109F
>> University California Santa Barbara, Santa Barbara, Ca. 93106
>>
>>
>> On Wed, Dec 17, 2025 at 14:03 Alex Dixon <agdixon at mines.edu> wrote:
>>
>>> For those of you with climate controls in your cleanrooms, what relative
>>> humidity do your keep your cleanroom at, and how tightly do you control the
>>> fluccuations?  How significant an effect have you seen on device
>>> performance?
>>>
>>> Our campus facilities is doing a climate control audit and asking any
>>> lab with special requirements to justify them. Any info you could share
>>> would be appreceated.
>>>
>>> Thanks!
>>> -Alex
>>>
>>> __________________________________________________________
>>>
>>>
>>> Alex Dixon, Ph.D. (He/Him)
>>> Lab Manager
>>> Nanofabrication and Thin Film Deposition
>>> Shared Instrument Facility
>>> Colorado School of Mines
>>>
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