[labnetwork] Suss MJB4 mask aligner light source

[Garry J. Bordonaro]

Nathan,

 

We replaced out Hg lamp in our MA6 with a LED unit from Idonus.  We have 3
wavelengths, each individually adjustable in intensity.  We have had no
issues other than it gets confused by a power outage requiring a manual
restart (press button) and the actual exposure time seems offset by one
second.  We have been very happy that we made the switch.  The swap can be
done in-house in a day, but we had an experienced tech do it for us.

 

 

Garry J. Bordonaro

Microlithographic Engineer

Cornell NanoScale Facility

250 Duffield Hall

343 Campus Road

Ithaca NY 14853-2700

(607) 254-4936

 <mailto:bordonaro at cnf.cornell.edu> bordonaro at cnf.cornell.edu

 <http://www.cnf.cornell.edu/> http://www.cnf.cornell.edu/

 

Please acknowledge CNF in your publications:

"This work was performed in part at the Cornell NanoScale Science &
Technology Facility (CNF), a member of the National Nanotechnology
Coordinated Infrastructure (NNCI), which is supported by the National
Science Foundation (Grant NNCI-2025233)."

 

 

 

 

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Nathan
Aultman
Sent: Monday, February 10, 2025 4:21 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Suss MJB4 mask aligner light source

 

Hello Labnetwork,

 

We have a Suss Microtec MJB4 contact mask aligner at one of our labs.  We
have been told that there is a Suss LED upgrade available.  Have any of your
labs purchased such an upgrade either from Suss or from a second source
supplier to replace your mercury arc lamps? 

 

Greatly appreciate any thoughts or suggestions.

 

Nathan C. Aultman

University of Central Florida

407-823-6852

 <mailto:naultman at creol.ucf.edu> naultman at creol.ucf.edu

 

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