[labnetwork] Suss MJB4 mask aligner light source

[Ryan R Anderson]

Hi Garry,

Do you (or anyone else out there) know what is the expected lifetime of these LED UV light sources?

Thank you



Ryan Anderson

Manager, Center for Nano-Micro Manufacturing

1209 Kemper Hall
University of California Davis
One Shields Avenue
Davis, CA 95616



Phone: 530-601-3943

Email: rrand at ucdavis.edu<mailto:rrand at ucdavis.edu>

https://cnm2.ucdavis.edu/





________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Garry J. Bordonaro <bordonaro at cnf.cornell.edu>
Sent: Tuesday, February 11, 2025 6:47 AM
To: 'Nathan Aultman' <naultman at creol.ucf.edu>; labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Suss MJB4 mask aligner light source


Nathan,



We replaced out Hg lamp in our MA6 with a LED unit from Idonus.  We have 3 wavelengths, each individually adjustable in intensity.  We have had no issues other than it gets confused by a power outage requiring a manual restart (press button) and the actual exposure time seems offset by one second.  We have been very happy that we made the switch.  The swap can be done in-house in a day, but we had an experienced tech do it for us.





Garry J. Bordonaro

Microlithographic Engineer

Cornell NanoScale Facility

250 Duffield Hall

343 Campus Road

Ithaca NY 14853-2700

(607) 254-4936

bordonaro at cnf.cornell.edu<mailto:bordonaro at cnf.cornell.edu>

http://www.cnf.cornell.edu/



Please acknowledge CNF in your publications:

"This work was performed in part at the Cornell NanoScale Science & Technology Facility (CNF), a member of the National Nanotechnology Coordinated Infrastructure (NNCI), which is supported by the National Science Foundation (Grant NNCI-2025233)."









From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Nathan Aultman
Sent: Monday, February 10, 2025 4:21 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Suss MJB4 mask aligner light source



Hello Labnetwork,



We have a Suss Microtec MJB4 contact mask aligner at one of our labs.  We have been told that there is a Suss LED upgrade available.  Have any of your labs purchased such an upgrade either from Suss or from a second source supplier to replace your mercury arc lamps?



Greatly appreciate any thoughts or suggestions…



Nathan C. Aultman

University of Central Florida

407-823-6852

naultman at creol.ucf.edu<mailto:naultman at creol.ucf.edu>


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