[labnetwork] Suss MJB4 mask aligner light source

[Garry J. Bordonaro]

The manufacturer claims lifetime over 10K hours.  Considering that the LEDs
are on for <10 sec. per exposure, I should be retired long before that
happens.

 

The reality is that these systems are too new to have any statistics.  They
will certainly last long enough to pay back the cost vs. Hg.

 

 

Garry J. Bordonaro

Microlithographic Engineer

Cornell NanoScale Facility

250 Duffield Hall

343 Campus Road

Ithaca NY 14853-2700

(607) 254-4936

 <mailto:bordonaro at cnf.cornell.edu> bordonaro at cnf.cornell.edu

 <http://www.cnf.cornell.edu/> http://www.cnf.cornell.edu/

 

Please acknowledge CNF in your publications:

"This work was performed in part at the Cornell NanoScale Science &
Technology Facility (CNF), a member of the National Nanotechnology
Coordinated Infrastructure (NNCI), which is supported by the National
Science Foundation (Grant NNCI-2025233)."

 

 

 

 

From: Ryan R Anderson <rrand at ucdavis.edu> 
Sent: Wednesday, February 12, 2025 9:23 AM
To: 'Nathan Aultman' <naultman at creol.ucf.edu>; labnetwork at mtl.mit.edu;
bordonaro at cnf.cornell.edu
Subject: Re: [labnetwork] Suss MJB4 mask aligner light source

 

Hi Garry,


Do you (or anyone else out there) know what is the expected lifetime of
these LED UV light sources?


Thank you

 

 

Ryan Anderson

Manager, Center for Nano-Micro Manufacturing

1209 Kemper Hall
University of California Davis
One Shields Avenue
Davis, CA 95616

 

Phone: 530-601-3943

Email:  <mailto:rrand at ucdavis.edu> rrand at ucdavis.edu

 <https://cnm2.ucdavis.edu/> https://cnm2.ucdavis.edu/

 

 

  _____  

From: labnetwork <labnetwork-bounces at mtl.mit.edu
<mailto:labnetwork-bounces at mtl.mit.edu> > on behalf of Garry J. Bordonaro
<bordonaro at cnf.cornell.edu <mailto:bordonaro at cnf.cornell.edu> >
Sent: Tuesday, February 11, 2025 6:47 AM
To: 'Nathan Aultman' <naultman at creol.ucf.edu <mailto:naultman at creol.ucf.edu>
>; labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu>
<labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu> >
Subject: Re: [labnetwork] Suss MJB4 mask aligner light source 

 

Nathan,

 

We replaced out Hg lamp in our MA6 with a LED unit from Idonus.  We have 3
wavelengths, each individually adjustable in intensity.  We have had no
issues other than it gets confused by a power outage requiring a manual
restart (press button) and the actual exposure time seems offset by one
second.  We have been very happy that we made the switch.  The swap can be
done in-house in a day, but we had an experienced tech do it for us.

 

 

Garry J. Bordonaro

Microlithographic Engineer

Cornell NanoScale Facility

250 Duffield Hall

343 Campus Road

Ithaca NY 14853-2700

(607) 254-4936

 <mailto:bordonaro at cnf.cornell.edu> bordonaro at cnf.cornell.edu

 <http://www.cnf.cornell.edu/> http://www.cnf.cornell.edu/

 

Please acknowledge CNF in your publications:

"This work was performed in part at the Cornell NanoScale Science &
Technology Facility (CNF), a member of the National Nanotechnology
Coordinated Infrastructure (NNCI), which is supported by the National
Science Foundation (Grant NNCI-2025233)."

 

 

 

 

From: labnetwork <labnetwork-bounces at mtl.mit.edu
<mailto:labnetwork-bounces at mtl.mit.edu> > On Behalf Of Nathan Aultman
Sent: Monday, February 10, 2025 4:21 PM
To: labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu> 
Subject: [labnetwork] Suss MJB4 mask aligner light source

 

Hello Labnetwork,

 

We have a Suss Microtec MJB4 contact mask aligner at one of our labs.  We
have been told that there is a Suss LED upgrade available.  Have any of your
labs purchased such an upgrade either from Suss or from a second source
supplier to replace your mercury arc lamps? 

 

Greatly appreciate any thoughts or suggestions.

 

Nathan C. Aultman

University of Central Florida

407-823-6852

 <mailto:naultman at creol.ucf.edu> naultman at creol.ucf.edu

 

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