[labnetwork] Silicon based high temperature thermal grease

[Gohmyeong Bae]

Dear Lab network,

We are looking for the high temperature silicon based thermal grease for the ICP/DEEP RIE etching system that can dissipate the heat on the back side of silicon wafer.

It should be covered in around Max. 660-degree Fahrenheit, which can properly applied into the ICP-RIE system either Oxford or other brand.

If you have any product information regarding this, please share to us.

Thank you.

Best,
Gohmyeong Bae.



Gohmyeong Bae, M. S.
He/Him/His
Institute of Applied Life Science (IALS)
Cleanroom Facility Manager for Nano and Device Fabrication Cleanroom
Conte building B111, Marcus Hall 25
Amherst, MA 01003
413-472-1570
gohmyeongbae at umass.edu

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