[labnetwork] Silicon based high temperature thermal grease

[Jeff Hawks]

https://www.aitechnology.com/product/cool-grease-cgr7016/

 

From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of
Gohmyeong Bae
Sent: Friday, January 03, 2025 9:58 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Silicon based high temperature thermal grease

 

Dear Lab network,

 

We are looking for the high temperature silicon based thermal grease for the
ICP/DEEP RIE etching system that can dissipate the heat on the back side of
silicon wafer.

 

It should be covered in around Max. 660-degree Fahrenheit, which can
properly applied into the ICP-RIE system either Oxford or other brand.

 

If you have any product information regarding this, please share to us.

 

Thank you.

 

Best,

Gohmyeong Bae.

 

 

 

Gohmyeong Bae, M. S.

He/Him/His

Institute of Applied Life Science (IALS)

Cleanroom Facility Manager for Nano and Device Fabrication Cleanroom

Conte building B111, Marcus Hall 25

Amherst, MA 01003

413-472-1570

gohmyeongbae at umass.edu

 

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