[labnetwork] RTA annealing of PVD Silicon

[Howard Northfield]

Dear Labnetwork

Currently doing PVD deposition of undoped Silicon. Would like to improve the surface roughness and crystal quality of the PVD Silicon using rapid thermal annealing (RTA). Does anyone have experience in this and what RTA recipe you use.

Thank you

Howard Northfield
Research Engineer
Advanced Research Complex (ARC)
University of Ottawa
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