[labnetwork] Question about toxic gas sensors inside fab

[henryh at tystar.com]

Hi Sandra,

     Henry from Tystar here. Regarding toxic monitoring of the two Tystar
LPCVD's, our electronics features CCINS (Contact Closure Inputs) that can be
connected to your toxic monitor systems that would alarm and disable the
reactive gases if the sensor detects levels above the sensors programmed
upper limits. Your silicon nitride uses NH3 and SiH2Cl2 sensors the LTO use
a SiH4 sensor. These sensors are normally mounted in the exhaust duct in the
top of the source gas cabinet. Sometimes customers mount sensors near the
load station scavenger exhaust where operators load and unload wafers. In
addition, most gas bottle delivery cabinet vendors include toxic monitor
sensors in their cabinets. Please contact me directly if you need additional
information or have any questions or concerns.

 

Best Regards,

Henry Heidbreder

Engineering Manager



7050 Lampson Ave., Garden Grove, Ca. 92841

* Office: 310-781-9219 ext 213  

* Cell: 310-618-4019

* Fax: 310-781-9438

*  <mailto:henryh at tystar.com> henryh at tystar.com

 <http://www.tystar.com/> http://www.tystar.com

 

 

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Malhotra,
Sandra Guy
Sent: Tuesday, January 28, 2025 1:11 PM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Question about toxic gas sensors inside fab

 

Howdy All,

We would like to understand the types of toxic gas sensors that are used
inside academic fabs near tools or gas lines. These would be in addition to
those inside toxic gas cylinder cabinets. 

 

We would appreciate learning which tools/toxic gases are monitored inside
your fabs and where the monitors are located. Any assistance would be
greatly appreciated!

 

Thanks for your time,

 

Sandra G. Malhotra, Ph.D.  |  Senior Laboratory Manager

 

We would greatly appreciate an acknowledgement of your work in AggieFab:
"The nanofabrication was conducted in the Texas A&M University AggieFab
Nanofabrication Facility (RRID:SCR_023639), which is supported by the Texas
A&M Engineering Experiment Station and Texas A&M University."

 

AggieFab Nanofabrication Facility

https://aggiefab.tamu.edu/

Department of Electrical & Computer Engineering, College of Engineering |
Texas A&M University

3253 TAMU | College Station, TX 77843

ph: 979.845.3199  |  sandra.malhotra at tamu.edu
<mailto:sandra.malhotra at tamu.edu> 

 

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TEXAS A&M UNIVERSITY | FEARLESS on Every Front

 

 

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