[labnetwork] Question about toxic gas sensors inside fab

[Dennis Schweiger]

Sandra,

Good morning.  Here at the University of Michigan LNF facility we're using
extractive units  for all our gas detection needs.  Either a chemical tape
(creating an optical stain), or electrochemical cell.  We have about 165
points of gas detection ranging from Hydrides, NF3, Ammonia, Oxygen
deprivation, to Hydrogen and Methane.  We have several locations where
we're sampling in breathing air (outside of the clean envelope) so that we
can "see" if a gas leak within the envelope will contaminate the larger
building.  Within the clean envelope, we have very little breathing air
detection (our earlier studies show that we have too much air movement for
it to be effective).  The points we do have in breathing air within the
envelope are at the scavenger exhausts at the entry/load stations of our
tube furnaces.  In addition, within our subfab area, we have some breathing
air detection in close proximity to our vacuum pumping stations that
support the process tools within the fab.

Now for the O2 deprivation sensors, those are located primarily outside of
the envelope where we have LN2 delivery stations, or usage points (MBE
tools).  Spots where it would be possible to have an unlimited amount of N2
released.

Thanks,

Dennis Schweiger
Facilities Manager
Lurie Nanofabrication Facility
University of Michigan

734.647.2055 Ofc

"People can be divided into 3 groups - those that make things happen, those
that watch things happen, and those that wonder what happened."  Within
which group do you belong?


On Tue, Jan 28, 2025 at 5:32 PM Malhotra, Sandra Guy <
sandra.malhotra at tamu.edu> wrote:

> Howdy All,
> We would like to understand the types of toxic gas sensors that are used
> inside academic fabs near tools or gas lines. These would be in addition to
> those inside toxic gas cylinder cabinets.
>
> We would appreciate learning which tools/toxic gases are monitored inside
> your fabs and where the monitors are located. Any assistance would be
> greatly appreciated!
>
> Thanks for your time,
>
> *Sandra G. Malhotra, Ph.D.  *|  Senior Laboratory Manager
>
>
> *We would greatly appreciate an acknowledgement of your work in AggieFab:
>  **“The nanofabrication was conducted in the Texas A&M University
> AggieFab Nanofabrication Facility (RRID:SCR_023639), which is supported by
> the Texas A&M Engineering Experiment Station and Texas A&M University."*
>
>
> AggieFab Nanofabrication Facility
>
> *https://aggiefab.tamu.edu/ <https://aggiefab.tamu.edu/>*
>
> Department of Electrical & Computer Engineering, College of Engineering |
> Texas A&M University
>
> 3253 TAMU | College Station, TX 77843
>
> ph: 979.845.3199  |  *sandra.malhotra at tamu.edu <sandra.malhotra at tamu.edu>*
>
>
> - - - - - - - - - - - - - - - - - - - - - - -
>
>
> *TEXAS A&M UNIVERSITY | FEARLESS on Every Front*
>
>
>
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