[labnetwork] Question about toxic gas sensors inside fab

[Leif Steen Johansen]

Hello Sandra,

At DTU Nanolab we use two types of gas sensors, both containing an electrochemical cartridge: Honeywell MST and Honeywell Midas. The sensors are typically placed in the tool exhaust - usually in the cabinet containing MFCs for the toxic gases. The rationale behind this placement is that gas leaks in the vicinity of this enclosure will eventually end up being sucked into the exhaust where it will be detected.

At very critical positions, we have installed additional room sensors that can detect gas leaks when opening a vacuum chamber - we e.g. have a diborane sensor sitting close to our PECVD chamber.

We have approximately 60 sensors. Below is a list of gas sensor types.

AsH3, arsine
B2H6, diborane
C4H10. butane
CH4, methane
Cl2, chlorine
CO, carbon monoxide
F2, fluorine
GeH4, germane
H2, hydrogen
HBr, hydrogen bromide
HCl, hydrogen chloride
HF, hydrogen fluoride
NH3, ammonia
O3, ozone
PH3, phosphine
SiH4, silane

Best regards,
Leif

Leif Steen Johansen
Head of Operations, Ph.D.

Dir. +45 45 25 57 13
Mob. +45 25 34 89 92
lesjo at dtu.dk<mailto:lesjo at dtu.dk>
Ørsteds Plads, Byg. 347
Building 347
2800 Lyngby
www.dtu.dk/english<https://www.dtu.dk/english>


From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Malhotra, Sandra Guy
Sent: 28. januar 2025 22:11
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Question about toxic gas sensors inside fab

Howdy All,
We would like to understand the types of toxic gas sensors that are used inside academic fabs near tools or gas lines. These would be in addition to those inside toxic gas cylinder cabinets.

We would appreciate learning which tools/toxic gases are monitored inside your fabs and where the monitors are located. Any assistance would be greatly appreciated!

Thanks for your time,


Sandra G. Malhotra, Ph.D.  |  Senior Laboratory Manager



We would greatly appreciate an acknowledgement of your work in AggieFab:  "The nanofabrication was conducted in the Texas A&M University AggieFab Nanofabrication Facility (RRID:SCR_023639), which is supported by the Texas A&M Engineering Experiment Station and Texas A&M University."



AggieFab Nanofabrication Facility

https://aggiefab.tamu.edu/

Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University

3253 TAMU | College Station, TX 77843

ph: 979.845.3199  |  sandra.malhotra at tamu.edu<mailto:sandra.malhotra at tamu.edu>



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TEXAS A&M UNIVERSITY | FEARLESS on Every Front



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