[labnetwork] Question about toxic gas sensors inside fab

[Collins, Deon]

This greatly depends on the gas you are working with and the equipment.

We are an H-5 Semiconductor facility. We have several HPM's when in normal operations. For the Acutely Toxic HMP's we use hydride tape-based systems. I monitor the gas vaults, gas cabinets, cleanroom space and toxic scrubbers for breakthrough with a CL-96. This tool can detect PPB for Arsine and Phosphine, etc. The TGM's are provided to us by DOD.

For oxygen displacement and other gases in the PPM range we use PS-7's with electrochromic modules for a predetermined gas. We have dozens of these around the facility for H2, O2 and other materials as needed. These are also from DOD.

You local and state regulations should give you a baseline to start with. Also look at the SEMI codes for guidance.



Deon D. Collins


Director of Facilities
The Grainger College Of Engineering UIUC
Holonyak Micro & Nanotechnology Lab
208 N Wright St Rm. 1114 | MC-249
Urbana, IL 61801
217-300-7531 | deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>


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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Malhotra, Sandra Guy
Sent: Tuesday, January 28, 2025 3:11 PM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Question about toxic gas sensors inside fab

Howdy All,
We would like to understand the types of toxic gas sensors that are used inside academic fabs near tools or gas lines. These would be in addition to those inside toxic gas cylinder cabinets.

We would appreciate learning which tools/toxic gases are monitored inside your fabs and where the monitors are located. Any assistance would be greatly appreciated!

Thanks for your time,


Sandra G. Malhotra, Ph.D.  |  Senior Laboratory Manager



We would greatly appreciate an acknowledgement of your work in AggieFab:  "The nanofabrication was conducted in the Texas A&M University AggieFab Nanofabrication Facility (RRID:SCR_023639), which is supported by the Texas A&M Engineering Experiment Station and Texas A&M University."



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ph: 979.845.3199  |  sandra.malhotra at tamu.edu<mailto:sandra.malhotra at tamu.edu>



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