[labnetwork] Question about toxic gas sensors inside fab

[Iulian Codreanu]

Hi Sandra,

At U Delaware we have 41 sensor monitoring O2 depletion, SiH4, H2, CH4, 
Cl2, NH3, BCl3, and F2.  They are extractive (sensors sample the 
location of interest via a 1/4" plastic tube), electrochemical type.  We 
monitor both exhausted enclosures and the ambient. The placement of the 
sampling tube for the exhausted enclosure is straightforward, i.e. in 
the exhaust ductwork. Determining the placement of the ambient sensors 
is a bit more challenging; they are placed in the operator area, 
typically in close proximity to loadlocks or the main processing 
chambers. The oxygen depletion sensors are placed in the gas room, gas 
bunker, and the LN2 fill station.

Good luck,

Iulian

iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
https://udnf.udel.edu

On 1/28/2025 4:10 PM, Malhotra, Sandra Guy wrote:
> Howdy All,
> We would like to understand the types of toxic gas sensors that are 
> used inside academic fabs near tools or gas lines. These would be in 
> addition to those inside toxic gas cylinder cabinets.
>
> We would appreciate learning which tools/toxic gases are monitored 
> inside your fabs and where the monitors are located. Any assistance 
> would be greatly appreciated!
>
> Thanks for your time,
>
> *Sandra G. Malhotra, Ph.D. *|  Senior Laboratory Manager
>
>
> /We would greatly appreciate an acknowledgement of your work in 
> AggieFab: //“The nanofabrication was conducted in the Texas A&M 
> University AggieFab Nanofabrication Facility (RRID:SCR_023639), which 
> is supported by the Texas A&M Engineering Experiment Station and Texas 
> A&M University."/
>
> /
> /
>
> AggieFab Nanofabrication Facility
>
> _https://aggiefab.tamu.edu/_
>
> Department of Electrical & Computer Engineering, College of 
> Engineering | Texas A&M University
>
> 3253 TAMU | College Station, TX 77843
>
> ph: 979.845.3199  | _sandra.malhotra at tamu.edu_
>
>
> - - - - - - - - - - - - - - - - - - - - - - -
>
>
> *TEXAS A&M UNIVERSITY | FEARLESS on Every Front*
>
>
>
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